@article{article, title = {{Templated cluster assembly for production of metallic nanowires in passivated silicon V-grooves}}, publisher = {{Elsevier BV}}, url = {{https://doi.org/10.1016/j.mee.2004.02.089 }}, year = {{2004}}, month = {{6}}, author = {{PARTRIDGE J}}, doi = {{10.1016/j.mee.2004.02.089}}, volume = {{73-74}}, journal = {{Microelectronic Engineering}}, pages = {{583-587}}, note = {{Accessed on 2025/07/07}}}